Optimization of LPCVD silicon oxynitride growth to large refractive index homogeneity and layer thickness uniformity

Optimization of LPCVD silicon oxynitride growth to large refractive index homogeneity and layer thickness uniformity

Author(s):

Worhoff,K. ( Univ.Twente(Netherlands) )

Lambeck,P.V. ( Univ.Twente(Netherlands) )

Albers,H. ( Univ.Twente(Netherlands) )

Noordman,O.F.J. ( Univ.Twente(Netherlands) )

van Hulst,N.F. ( Univ.Twente(Netherlands) )

Popma,Th.J.A. ( Univ.Twente(Netherlands) )

1 more

Publication title:

Micro-optical technologies for measurement, sensors, and microsystems II and Optical fiber sensor technologies and applications : 18-20 June 1997, Munich, FRG

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3099

Pub. Year:

1997

Vol.:

Part 1

Page(from):

257

Page(to):

268

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425195 [0819425192]

Language:

English

Call no.:

P63600/3099

Type:

Conference Proceedings

Details

TDL ID:	ZA00019730
Series ID:	PA00000029
Conf. info. (Name):	Lasers, Optics, and Vision for Productivity in Manufacturing : Micro-optical Technologies for Measurement, Sensors, and Microsystems
Conf. info. (Number):	1997 : 2nd
Conf. info. (Venue):	Munich, FRG
Conf. info. (Date):	1997.06.18-1997.06.20

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