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Micromachined aperture probe tip for multifunctional scanning probe microscopy

Author(s):
Abraham,M. ( Institute of Microtechnology Mainz GmbH(FRG) )
Ehrfeld,W. ( Institute of Microtechnology Mainz GmbH(FRG) )
Lacher,M. ( Institute of Microtechnology Mainz GmbH(FRG) )
Marti,O. ( Univ.of Ulm(FRG) )
Mayr,K. ( Institute for Microtechnology Mainz GmbH(FRG) )
Noell,W. ( Institute for Microtechnology Mainz GmbH(FRG) )
Guthner,P. ( Omicron Vakuumphysik GmbH(FRG) )
Barenz,J. ( Univ.of Ulm(FRG) )
3 more
Publication title:
Micro-optical technologies for measurement, sensors, and microsystems II and Optical fiber sensor technologies and applications : 18-20 June 1997, Munich, FRG
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3099
Pub. Year:
1997
Vol.:
Part 1
Page(from):
248
Page(to):
256
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425195 [0819425192]
Language:
English
Call no.:
P63600/3099
Type:
Conference Proceedings

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