Design,fabrication,and testing of micro-optical components for sensors and microsystems

Design,fabrication,and testing of micro-optical components for sensors and microsystems

Author(s):

Volkel,R. ( Institute of Microtechnology/Univ of Neuchitel(Switzerland) )

Nussbaum,Ph. ( Institute of Microtechnology/Univ of Neuchitel(Switzerland) )

Roulet,J.-Ch. ( Institute of Microtechnology/Univ of Neuchitel(Switzerland) )

Blattner,P. ( Institute of Microtechnology/Univ of Neuchitel(Switzerland) )

Weible,K.J. ( Weible OpTech(Switzerland) )

Herzig,H.P. ( Institute of Microtechnology/Univ.of Neuchatel(Switzerland) )

1 more

Publication title:

Micro-optical technologies for measurement, sensors, and microsystems II and Optical fiber sensor technologies and applications : 18-20 June 1997, Munich, FRG

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3099

Pub. Year:

1997

Vol.:

Part 1

Page(from):

196

Page(to):

211

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425195 [0819425192]

Language:

English

Call no.:

P63600/3099

Type:

Conference Proceedings

Details

TDL ID:	ZA00019730
Series ID:	PA00000029
Conf. info. (Name):	Lasers, Optics, and Vision for Productivity in Manufacturing : Micro-optical Technologies for Measurement, Sensors, and Microsystems
Conf. info. (Number):	1997 : 2nd
Conf. info. (Venue):	Munich, FRG
Conf. info. (Date):	1997.06.18-1997.06.20

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