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Theoretical model for the reactive pulsed deposition process: application to the case of ablation of a Ti target in low-pressure N2

Author(s):
  • Neamtu,J. ( Univ.of Craiova (Romania) )
  • Mihailescu,I.N. ( National Institute for Laser,Plasma,and Radiation Physics (Romania) )
Publication title:
ROMOPTO '97, Fifth Conference on Optics, 9-12 September, 1997, Bucharest, Romania
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3405
Pub. Year:
1998
Vol.:
Part 1
Page(from):
305
Page(to):
310
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428578 [0819428574]
Language:
English
Call no.:
P63600/3405
Type:
Conference Proceedings

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