Theoretical model for the reactive pulsed deposition process: application to the case of ablation of a Ti target in low-pressure N2
- Author(s):
- Neamtu,J. ( Univ.of Craiova (Romania) )
- Mihailescu,I.N. ( National Institute for Laser,Plasma,and Radiation Physics (Romania) )
- Publication title:
- ROMOPTO '97, Fifth Conference on Optics, 9-12 September, 1997, Bucharest, Romania
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3405
- Pub. Year:
- 1998
- Vol.:
- Part 1
- Page(from):
- 305
- Page(to):
- 310
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819428578 [0819428574]
- Language:
- English
- Call no.:
- P63600/3405
- Type:
- Conference Proceedings
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