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Compact FTIR wafer-state sensors: a new way of in-line ULSI characterization

Author(s):
Yakovlev,V.A. ( On-Line Technologies Inc. )
Charpenay,S. ( On-Line Technologies Inc. )
Richter,M. ( On-Line Technologies Inc. )
Rosenthal,P.A. ( On-Line Technologies Inc. )
Solomon,P.R. ( On-Line Technologies Inc. )
Xu,J. ( On-Line Technologies Inc. )
1 more
Publication title:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II :23-24 September 1998 Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3509
Pub. Year:
1998
Page(from):
74
Page(to):
83
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780081942963 [0081942968]
Language:
English
Call no.:
P63600/3509
Type:
Conference Proceedings

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