Plasma diagnostics in KrF excimer laser deposition of Ti thin films
- Author(s):
- Publication title:
- Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3550
- Pub. Year:
- 1998
- Page(from):
- 441
- Page(to):
- 449
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430113 [0819430110]
- Language:
- English
- Call no.:
- P63600/3550
- Type:
- Conference Proceedings
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