Deposition and Etching Mechanisms in Plasma Thin Film Processes

Deposition and Etching Mechanisms in Plasma Thin Film Processes

Author(s):: Kuo Y.
Publication title:: Application of particle and laser beams in materials technology
Title of ser.:: NATO ASI series. Series E, Applied sciences
Ser. no.:: 283
Pub. Year:: 1995
Page(from):: 581
Page(to):: 593
Pages:: 13
Pub. info.:: Dordrecht: Kluwer Academic Publishers
ISSN:: 0168132X
ISBN:: 9780792333241 [0792333241]
Language:: English
Call no.:: N11482/283
Type:: Conference Proceedings

Details

TDL ID:	ZA00019642
Series ID:	PA00000018
Conf. info. (Name):	NATO Advanced Study Institute on Application of Particle and Laser Beams in Materials Technology
Conf. info. (Number):	1994
Conf. info. (Venue):	Kallithea, Chalkidiki, Greece
Conf. info. (Date):	1994.05.18-1994.05.21

Similar Items:

1 Conference Proceedings Plasma Enhanced Chemical Vapor Deposition of SiNk for Thin Film Transistors Kuo, Y. Electrochemical Society	7 Conference Proceedings Etching mechanism of Au thin films in Cl2/Ar inductively coupled plasma Efremov, A., Svettsov, V., Kim, C.-I. SPIE - The International Society of Optical Engineering
2 Conference Proceedings Plasma Etching Mechanism of Metel Oxides Derived from RIE of Ta2O5 and TiO2 Kuo, Y. Electrochemical Society	8 Conference Proceedings Thin Film Transistors in ULSI -Status and Future* Kuo, Y. Electrochemical Society
3 Conference Proceedings Plasma Thin Film Technologies for a-Si:H TFT Fabrication Kuo, Y. Electrochemical Society	9 Conference Proceedings Hydrogenation of Amorphous Silicon Thin Film Transistors Kuo, Y. Electrochemical Society
4 Conference Proceedings Emission Spectra Study of Plasma Enhanced Chemical Vapor Deposition of Intrinsic, n⁺, and p⁺ Amorphous Silicon Thin Films I-Syuan Lee, Yue Kuo Materials Research Society	10 Conference Proceedings Thin Film Transistors with Layered a-Si:H Structure Kuo, Y. MRS - Materials Research Society
5 Conference Proceedings (250b) RF Plasmas for Thin Film Etching, Deposition, and Surface Modification Dennis W. Hess American Institute of Chemical Engineers	11 Conference Proceedings Thin Film Transistor and ULSIC Technologies - Parallel or Crossing? Y. Kuo Electrochemical Society
6 Conference Proceedings (250b) RF Plasmas for Thin Film Etching, Deposition, and Surface Modification Dennis W. Hess American Institute of Chemical Engineers	12 Conference Proceedings Diagnostics, Mechanisms of Deposition, and Process Control of Thin Fluoropolymeric Films in rf Discharges d'Agostino, R. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12