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PLASMA ASSISTED THIN FILM PRODUCTION WC, a-C: H and DIAMOND FILMS

Author(s):
Ehrhardt H.  
Publication title:
Nonequilibrium processes in partially ionized gases
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
220
Pub. Year:
1990
Page(from):
251
Page(to):
259
Pages:
9
Pub. info.:
New York: Plenum Press
ISBN:
9780306435867 [0306435861]
Language:
English
Call no.:
N11479/220
Type:
Conference Proceedings

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