Silicon nitride membranes for filtration and separation
- Author(s):
- Galambos,P. ( Sandia National Labs. )
- Zavadil,K.
- Shul,R.J.
- Willison,C.G.
- Miller,S.L.
- Publication title:
- Microfluidic Devices and Systems II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3877
- Pub. Year:
- 1999
- Page(from):
- 273
- Page(to):
- 283
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434746 [0819434744]
- Language:
- English
- Call no.:
- P63600/3877
- Type:
- Conference Proceedings
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