Comparison and analysis on measurement of optical parameters of some semiconductor films by two methods
- Author(s):
- Publication title:
- Recent advances in metrology, characterization, and standards for optical digital data disks : 21-22 July 1999, Denver, Colorado
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3806
- Pub. Year:
- 1999
- Page(from):
- 169
- Page(to):
- 176
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432926 [081943292X]
- Language:
- English
- Call no.:
- P63600/3806
- Type:
- Conference Proceedings
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