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Step-height metrology for data storage applications

Author(s):
Kdning,R. ( National Institute of Standards and Technology )
Dixson,R.C.
Fu,J.
Renegar,B.T.
Vorburger,T.V.
Tsai,V.W.
Postek,M.T.,Jr.
2 more
Publication title:
Recent advances in metrology, characterization, and standards for optical digital data disks : 21-22 July 1999, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3806
Pub. Year:
1999
Page(from):
21
Page(to):
29
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432926 [081943292X]
Language:
English
Call no.:
P63600/3806
Type:
Conference Proceedings

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