Small displacement analysis of microaccelerometer by integrated phase-shifting method

Author(s):

• Fujigaki,M. ( Wakayama Univ. )
• Morimoto,Y.
• Toda,H.

Publication title:

Interferometry '99 : techniques and technologies : 20-23 September 1999, Pułtusk, Poland

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3744

Pub. Year:

1999

Page(from):

101

Page(to):

108

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819432247 [0819432245]

Language:

English

Call no.:

P63600/3744

Type:

Conference Proceedings