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Experimentation of electrostatically actuated monochip micropump for drug delivery

Author(s):
Dilhan,M. ( LAAS-CNRS )
Tasselli,J.
Esteve,D.
Temple-Boyer,P.
Camon,H.
Anduze,M.
Colin,S.
2 more
Publication title:
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3680
Pub. Year:
1999
Vol.:
Part2
Page(from):
887
Page(to):
896
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431547 [0819431540]
Language:
English
Call no.:
P63600/3680
Type:
Conference Proceedings

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