Electrostatically driven micromachined nickel resonators and gyroscopes
- Author(s):
- Renken,O. ( Univ.of Bremen )
- Benecke,W.
- Publication title:
- Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3680
- Pub. Year:
- 1999
- Vol.:
- Part2
- Page(from):
- 716
- Page(to):
- 727
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431547 [0819431540]
- Language:
- English
- Call no.:
- P63600/3680
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
2
Conference Proceedings
Electrostatic actuated optical Fabry-Perot switches in passive matrix displays
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Electrostatic beam actuator for switching applications fabricated by Ni-microelectroplating and thermal postprocessing
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Non-Destructive Evaluation of the Strength of Direct Bonded Silicon Wafers by Acoustic Measurements
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Thick porous silicon sacrificial layer formation using implanted mask technology
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Resonance characteristics of fiber optic ring resonator in fiber optical resonator gyroscope
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |