Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys

Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys

Author(s):

Allen,D.M. ( Cranfield Univ. )
Impey,S.A.
Robin,R.
Chen,T.T.

Publication title:

Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3680

Pub. Year:

1999

Vol.:

Part1

Page(from):

478

Page(to):

485

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819431547 [0819431540]

Language:

English

Call no.:

P63600/3680

Type:

Conference Proceedings

Details

TDL ID:	ZA00019464
Series ID:	PA00000029
Conf. info. (Name):	Design, test, and microfabrication of MEMS and MOEMS
Conf. info. (Number):	1999
Conf. info. (Venue):	Paris, France
Conf. info. (Date):	1999.03.30-1999.04.01

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