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Manufacturing an advanced process characterization reticle incorporating halftone biasing

Author(s):
Nakagawa,K.H. ( Photronics,Inc. )
Broeke,D.Van Den
Chen,J.F.
Laidig,T.L.
Wampler,K.E.
Caldwell,R.F.
1 more
Publication title:
15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3665
Pub. Year:
1999
Page(from):
129
Page(to):
134
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431394 [0819431397]
Language:
English
Call no.:
P63600/3665
Type:
Conference Proceedings

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