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Overview of SCALPEL mask technology

Author(s):
Bogart,G.R. ( Lucent Technologies/Bell Labs. )
Novembre,A.E.
Kornblit,A.
Peabody,M.L.
Farrow,R.C.
Blakey,M.I.
Kasica,R.J.
Liddle,J.A.
Saunders,T.E.
Knurek,C.S.
5 more
Publication title:
15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3665
Pub. Year:
1999
Page(from):
18
Page(to):
19
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431394 [0819431397]
Language:
English
Call no.:
P63600/3665
Type:
Conference Proceedings

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