The Fabrication and Reliability of a Photovia Test Vehicle for MCM-L Applications
- Author(s):
Zhang,Suixin ( EIJS/TFCG-IMEC ) Vereeken,M. Baets,J.De Peeters,J. Allaert,K. Calster,A.Van - Publication title:
- Microelectronics : 1-4 November 1998, San Diego Convention Center, San Diego, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3582
- Pub. Year:
- 1998
- Page(from):
- 53
- Page(to):
- 58
- Pub. info.:
- Bellingham, Wash. — Reston, VA: SPIE - The International Society for Optical Engineering — IMAPS
- ISSN:
- 0277786X
- ISBN:
- 9780930815523 [0930815521]
- Language:
- English
- Call no.:
- P63600/3582
- Type:
- Conference Proceedings
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