High-speed monitoring and control of CVD metal-organic precursors using FT-IR spectroscopy

High-speed monitoring and control of CVD metal-organic precursors using FT-IR spectroscopy

Author(s):

Marran,D.F. ( Advanced Fuel Research,Inc. )
Nelson,C.M.
Guido,L.J.
Caffey,B.

Publication title:

Advanced sensors and monitors for process industries and the environment : 4-5 November 1998, Boston, Massachusetts

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3535

Pub. Year:

1999

Page(from):

24

Page(to):

31

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429964 [0819429961]

Language:

English

Call no.:

P63600/3535

Type:

Conference Proceedings

Details

TDL ID:	ZA00019452
Series ID:	PA00000029
Conf. info. (Name):	Photonics East : Advanced Sensors and Monitors for Process Industries and the Enviroment
Conf. info. (Number):	1998
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1998.11.04-1998.11.05

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