Comparison of 3D surfaces produced by 248-nm and 193-nm excimer laser radiation

Comparison of 3D surfaces produced by 248-nm and 193-nm excimer laser radiation

Author(s):

Tonshoff,H.K. ( Laser Zentrum Hannover e.V. )
Graumann,C.
Rinke,M.
Hesener,H.
Kulik,C.

Publication title:

Microrobotics and micromanipulation : 4-5 November 1998, Boston, Massachusetts

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3519

Pub. Year:

1998

Page(from):

208

Page(to):

218

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429803 [0819429805]

Language:

English

Call no.:

P63600/3519

Type:

Conference Proceedings

Details

TDL ID:	ZA00019451
Series ID:	PA00000029
Conf. info. (Name):	Photonics East : Microrobotics and Micromanipulation
Conf. info. (Number):	1998
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1998.11.04-1998.11.05

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