Nanostructure fabrication process for optoelectronic applications
- Author(s):
- Malinin,A.A. ( Helsinki Univ.of Technology )
- Ovchinnikov,V.F.
- Toivola,T.H.
- Tuovinen,C.J.-J.
- Publication title:
- Optical devices and diagnostics in materials science, 1-4 August 2000, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4098
- Pub. Year:
- 2000
- Page(from):
- 65
- Page(to):
- 75
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437433 [0819437433]
- Language:
- English
- Call no.:
- P63600/4098
- Type:
- Conference Proceedings
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