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Nano-oxidation of semiconductor heterostructures with atomic force microscopes:technology and applications

Author(s):
Heinzel,T.M. ( ETH Zurich )
Luscher,S.
Fuhrer,A.
Salis,G.
Held,R.
Ensslin,K.
Wegscheider,W.
Bichler,M.
3 more
Publication title:
Optical devices and diagnostics in materials science, 1-4 August 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4098
Pub. Year:
2000
Page(from):
52
Page(to):
64
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437433 [0819437433]
Language:
English
Call no.:
P63600/4098
Type:
Conference Proceedings

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