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Comparison of ArF and KrF laser performance at 2 kHz for microlithography

Author(s):
Besaucele,H. ( Cymer,Inc. )
Das,P.P.
Duffey,T.P.
Embree,T.J.
Ershov,A.I.
Fleurov,V.B.
Grove,S.L.
Melcher,P.C.
Ness,R.
Padmabandu,G.G.
5 more
Publication title:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
Pub. Year:
2000
Vol.:
Part2
Page(from):
1476
Page(to):
1480
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436184 [0819436186]
Language:
English
Call no.:
P63600/4000
Type:
Conference Proceedings

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