High-resolution multigrating spectrometer for high-quality deep-UV light source production
- Author(s):
- Suzuki,T. ( Komatsu Ltd. )
- Nakaike,T.
- Wakabayashi,O.
- Mizoguchi,H.
- Publication title:
- Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4000
- Pub. Year:
- 2000
- Vol.:
- Part2
- Page(from):
- 1452
- Page(to):
- 1460
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436184 [0819436186]
- Language:
- English
- Call no.:
- P63600/4000
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
High-resolution multigrating spectrometer for high-quality deep-UV light source production
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
GT40A: durable 45-W ArF injection-lock laser light source fordryjimmersion lithography [6154-99]
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
High-spectral-purity and high-durability kHz KrF excimer laser with advanced rf preionization discharge
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Ultra line narrowed injection lock laser light source for higher NA ArF immersion lithography tool
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Highly durable low CoO mass production version of 2-kHz ArF excimer laser for DUV lithography
SPIE - The International Society for Optical Engineering |
11
Conference Proceedings
Design of high-average-power clean EUV light source based on laser-produced Xenon plasma
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |