Integration of attenuated phase-shift mask to 0.13-ｦﾌm technology contact level masking process

Integration of attenuated phase-shift mask to 0.13-ｦﾌm technology contact level masking process

Author(s):

Choo,L.C. ( Chartered Semiconductor Manufacturing,Ltd. )
Park,O.
Sack,M.J.
Tam,S.

Publication title:

Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4000

Pub. Year:

2000

Vol.:

Part2

Page(from):

1193

Page(to):

1202

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436184 [0819436186]

Language:

English

Call no.:

P63600/4000

Type:

Conference Proceedings

Details

TDL ID:	ZA00019438
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	2000 : 13th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2000.03.01-2000.03.03

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