Optical proximity correction considering mask manufacturability and its application to 0.25-ヲフm DRAM for enhanced device performance
- Author(s):
Park,C.-H. ( Samsung Electronics Co.,Ltd. ) Rhie,S.-U. Choi,J.-H. Park,J.-S. Seo,H.-W. Kim,Y.-H. Park,Y.-K. Han,W.-S. Lee,W.-S. Kong,J.-T. - Publication title:
- Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4000
- Pub. Year:
- 2000
- Vol.:
- Part2
- Page(from):
- 1041
- Page(to):
- 1046
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436184 [0819436186]
- Language:
- English
- Call no.:
- P63600/4000
- Type:
- Conference Proceedings
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