Blank Cover Image

Automatic parallel optical proximity correction and verification system

Author(s):
Publication title:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
Pub. Year:
2000
Vol.:
Part2
Page(from):
1015
Page(to):
1023
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436184 [0819436186]
Language:
English
Call no.:
P63600/4000
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Automatic parallel optical proximity correction system for application with hierarchical data structure

Tsujimoto,E., Watanabe,T., Nakajo,K.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Design optimization of optical proximity correction mask for device manufacturing

E. Sugiura, H. Watanabe, T. Imoriya, Y. Todokoro

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Hierarchical mask data design system (PROPHET) for aerial image simulation,automatic phase-shifter placement,and subpeak overlap checking

Tsujimoto,E., Watanabe,T., Sato,Y., Moniwa,A., Igarashi,Y., Nakajo,K.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Automated method to check sidelobe overlap projected by adjacent apertures in attenuated phase-shift masks

Nakajo,K., Sakemi,J., Moniwa,A., Terasawa,T., Hasegawa,N., Tsujimoto,E.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Enhancement of hierarchical mask data design system (PROPHET)

Watanabe, T., Tsujimoto, E., Maeda, K., Fukuda, H.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings New mask data verification method after optical proximity effect correction

Ogawa,K., Ashida,I., Kawahira,H.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Application of automatic parallel fracturing system on hierarchical and large data structure

Tsujimoto,E., Watanabe,T., Katabuchi,K., Nogami,A., Shibayama,S., Sambayashi,H., Takaku,S., Takase,N.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Verifying the "correctness" of your optical proximity correction designs

Malhotra,V.K., Chang,F.-C.

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Automatic optical proximity correction with optimization of stepper condition

S. Inoue, T. Fujisawa, S. Tanaka, S. Mimotogi, A. Nikki

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Tolerance-based process proximity correction (PPC) verification methodology

Hashimoto, K., Fujise, H., Nojima, S., Ito, T., Ikeda, T.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Advanced hybrid optical proximity correction system with OPC segment library and model-based correction module

Kotani, T., Kobayashi, S., Ichikawa, H., Tanaka, S., Watanabe, S., Inoue, S.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers

Kobayashi,S., Uno,T., Yamamoto,K., Tanaka,S., Kotani,T., Inoue,S., Higurashi,H., Watanabe,S., Yano,M., Ohki,S., …

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12