Mask topography effects in low k1 lithography
- Author(s):
- McCallum,M. ( Motorola(USA)and International SEMATECH )
- Gordon,R.L.
- Publication title:
- Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4000
- Pub. Year:
- 2000
- Vol.:
- Part1
- Page(from):
- 695
- Page(to):
- 700
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436184 [0819436186]
- Language:
- English
- Call no.:
- P63600/4000
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Dependence of mask topography effects on pattern variation under hyper-NA lithography
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Through-pitch correction of scattering effects in 193-nm alternating phase-shift masks
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Assessment of a hypothetical road map that extends optical lithography through the 70-nm technology node
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Assessment of a hypothetical roadmap that extends optical lithography through the 70-nm technology node
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
Optimizing edge topography of alternating phase-shift masks using rigorous mask modeling
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Pattern-dependent correction of mask topography effects for alternating phase-shifting masks
Society of Photo-optical Instrumentation Engineers |