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Micro-opto-electro-mechanical(MOEM)vibration sensor

Author(s):
Publication title:
Smart structures and materials 2000 : smart electronics and MEMS : 6-8 March, 2000, Newport Beach, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3990
Pub. Year:
2000
Page(from):
78
Page(to):
85
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436085 [0819436089]
Language:
English
Call no.:
P63600/3990
Type:
Conference Proceedings

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