High density dry-etching of (Ba,Sr) TiO3 and LaNiO3
- Author(s):
Lee, K. P. Jung, K. B. Srivastava, A. Kumar, D. Singh, R. K. Pearton, S. J. - Publication title:
- Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 596
- Pub. Year:
- 2000
- Page(from):
- 91
- Pub. info.:
- Warrendale, PA: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995048 [1558995048]
- Language:
- English
- Call no.:
- M23500/596
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Dry etching to form submicron features in CMR oxides: (Pr, Ba,Ca)MnO3 and (La,Sr)MnO3
MRS-Materials Research Society |
MRS - Materials Research Society |
2
Conference Proceedings
Studies of Dielectric Properties of Pulsed Laser Deposited (Ba,Sr)TiO3 Films Using LaNiO3 as Conductive Electrode
MRS - Materials Research Society |
MRS - Materials Research Society |
3
Conference Proceedings
High density plasma etching of Ta2O5-selectivity to Si and effect of UV light enhancememt
MRS-Materials Research Society |
Electrochemical Society |
Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
6
Conference Proceedings
Ion-enhanced dry etching of magnetic multilayers: Post-etch cleaning and effects of UV illumination
MRS-Materials Research Society |
12
Conference Proceedings
HIGH DENSITY MAGNETICALLY CONFINED DRY ETCHING OF METALLIZATION AND DIELECTRICS IN GaAs DEVICE TECHNOLOGY
MRS - Materials Research Society |