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*Integration issues of (Ba,Sr) TiO3 thin films in high density devices

Author(s):
Yoo, C. Y.
Park, H. B.
Hwang, D. S.
Hideki, H.
Kim, W. D.
Lim, H. J.
Lee, B. T.
Park, Y. W.
Lee, S. I.
Lee, M. Y.
5 more
Publication title:
Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
596
Pub. Year:
2000
Page(from):
11
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995048 [1558995048]
Language:
English
Call no.:
M23500/596
Type:
Conference Proceedings

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