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SURFACE CLEANING FOR SILICON EPITAXY USING PHOTOEXCITED FLUORINE GAS

Author(s):
Publication title:
Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
318
Pub. Year:
1994
Page(from):
269
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992177 [1558992170]
Language:
English
Call no.:
M23500/318
Type:
Conference Proceedings

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