MECHANICAL PROPERTIES AND RESIDUAL STRESSES IN OXIDE/METAL MULTILAYER FILMS SYNTHESIZED BY ION BEAM ASSISTED DEPOSITION

MECHANICAL PROPERTIES AND RESIDUAL STRESSES IN OXIDE/METAL MULTILAYER FILMS SYNTHESIZED BY ION BEAM ASSISTED DEPOSITION

Author(s):

Publication title:

Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

308

Pub. Year:

1993

Page(from):

695

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992047 [1558992049]

Language:

English

Call no.:

M23500/308

Type:

Conference Proceedings

Details

TDL ID:	ZA00019387
Series ID:	PA00000011
Conf. info. (Name):	Symposium on thin films: stresses and mechanical properties
Conf. info. (Number):	4th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1993.04.12-1993.04.16

Similar Items:

1 Conference Proceedings Residual Stress Control by Ion Beam Assisted Deposition Was, G. S., Jones, J. W., Parfitt, L., Kalnas, C. E., Goldiner, M. MRS - Materials Research Society	7 Conference Proceedings Native Oxide and the Residual Stress of Thin Mo and Ta Films Parfitt, L. J., Rek. Z. U., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society
2 Conference Proceedings MICROSTRUCTURE AND RESIDUAL STRESSES IN Al2O3 PREPARED BY ION BEAM ASSISTED DEPOSITION Goldiner, M. G., Was, G. S., Parfitt, L. J., Jones, J. W. MRS - Materials Research Society	8 Conference Proceedings Surface Morphology of Nb Films by Ion-Beam-Assisted Deposition Ji, Hong, Was, Gary S., Jones, J. Wayne, Moody, Neville R. MRS - Materials Research Society
3 Conference Proceedings SYNTHESIS AND PROPERTIES OF Mo/MoSiX MICROLAMINATES USING ION BEAM ASSISTED DEPOSITION Mashayekhi, A., Parfitt, L., Kalnas, C., Jones, J.W., Was, G.S., Hoffman, D.W. Materials Research Society	9 Conference Proceedings Ion-Beam-Assisted Deposition of Metal Nanocluster Thin Films with Nonlinear Optical Properties Cotell, C. M., Carosella, C. A., Flom, S. R., Schiestel, S., Haralampus, N., Barnett, T. W., Bartoli, F. J. MRS - Materials Research Society
4 Conference Proceedings SYNTHESIS OF A1 AND A12O3 COATINGS BY ION BEAM ASSISTED DEPOSITION Kalnas, C. E., Parfitt, L. J., Mashayekhi, A., Jones, J. W., Was, G. S., Hoffman, D. W. Materials Research Society	10 Conference Proceedings MECHANICAL AND OPTICAL PROPERTIES OF THIN FILMS OF TANTALUM OXIDE DEPOSITED BY ION-ASSISTED DEPOSITION Martin, P. J., Bendavid, A., Swain, M. V., Netterfield, R. P., Kinder, T. J., Sainty, W. G., Drage, D. MRS - Materials Research Society
5 Conference Proceedings Synthesis and Mechanical Properties of Niobium Films by Ion Beam Assisted Deposition Ji, H., Was, G. S., Jones, J. W. MRS - Materials Research Society	11 Conference Proceedings Origins of Residual Stress in Mo and Ta Films: The Role of Impurities, Microstructural Evolution, and Phase Transformations Parfitt, L. J., Karpenko, O. P., Rek, Z. U., Yalisove, S. M., Bilello, J. C. MRS - Materials Research Society
6 Conference Proceedings CHARACTIRIZATION OF SURFACE MECHANICAL PROPERTIES AND RESIDUAL STRESSES IN ION IMPLANTED INCKEL Morrison, D.J., Jones, J.W., Was, G.S., Mashayekhi, A., Hoffman, D.W. Materials Research Society	12 Conference Proceedings i-CxSiyOzHw FILMS FORMED BY ION BEAM ASSISTED DEPOSITION Fountzoulas, C.G., Demaree, J.D., Kosik, W.E., Franzen, W., Croft, W., Hirvonen, J.K. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12