Blank Cover Image

Measurement of Thin Film Mechanical Properties by Microbeam Bending

Author(s):
Florando, J.
Fujimoto, H.
Ma, Q.
Kraft, O.
Schwaiger, R.
Nix, W. D.
1 more
Publication title:
Materials reliability in microelectronics IX : symposium held April 6-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
563
Pub. Year:
1999
Page(from):
231
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994706 [155899470X]
Language:
English
Call no.:
M23500/563
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Measurement of Mechanical Properties in Small Dimensions By Microbeam Deflection

Kraft, O., Schwaiger, R., Nix, W. D.

MRS - Materials Research Society
7 Conference Proceedings MEASURING THE MECHANICAL PROPERTIES OF THIN METAL FILMS BY MEANS OF BULGE TESTING OF MICROMACHINED WINDOWS

Paviot, V. M., Vlassak, J. J., Nix, W. D.

MRS - Materials Research Society
2 Conference Proceedings Study of the Yielding and Strain Hardening Behavior of a Copper Thin Film on a Silicon Substrate Using Microbeam Bending

Florando, Jeffrey N., Nix, William D.

Materials Research Society
8 Conference Proceedings APPLICATION OF STRESS MEASUREMENT TO THE STUDY OF THERMALLY ACTIVATED PROCESSES IN THIN-FILM MATERIALS

von Preissig, F. J., Nix, W. D.

Materials Research Society
3 Conference Proceedings Fatigue of thin silver investigated by dynamic microbeam deflection

Schwaiger, R., Kraft, O.

MRS-Materials Research Society
9 Conference Proceedings Determination of Temperature-Dependent Unstressed Lattice Spacings in Crystalline Thin Films on Substrates

Cornella, G., Lee, S., Kraft, O., Nix, W. D., Bravman, J. C.

MRS - Materials Research Society
4 Conference Proceedings Thermomechanical Behavior of Continuos and Patterned Al Thin Films

Kraft, O., Nix, W. D.

MRS - Materials Research Society
10 Conference Proceedings ELECTROMIGRATION RESISTANCE AND MECHANICAL STRENGTH: NEW PERSPECTIVES FOR INTERCONNECT MATERIALS?

Arzt, E., Kraft, O., Sanchez, J., Bader, S., Nix, W. D.

Materials Research Society
5 Conference Proceedings MEASURING THE STRENGTH AND STIFFNESS OF THIN FILM MATERIAL BY MECHANICALLY DEFLECTING CANTILEVER MICROBEAMS

Weihs, T.P., Hong, S., Bravman, J.C., Nix, W.D.

Materials Research Society
11 Conference Proceedings MECHANICAL PROPERTIES OF Ag/Cr MULTILAYERED EPITAXIAL THIN FILMS

English, Gerald R., Simenson, Glenn F., Clemens, Bruce M., Nix, William D.

MRS - Materials Research Society
6 Conference Proceedings MECHANICAL PROPERTIES OF COMPOSITIONALLY MODULATED Au-Ti THIN FILMS USING INDENTATION AND MICROBEAM DEFLECTION TECHNIQUES

Baker, Shefford P., Jankowski, Alan F., Hong, Soonil, Nix, William D.

Materials Research Society
12 Conference Proceedings Measurement of the Fracture Energy of SiO2/TiN Interfaces Using the Residually-Stressed Thin-Film Micro-Strip Test

Xu, Guanghai, Ragan, D. D., Clarke, D. R., He, Ming Y., Ma, Qing, Fujimoto, H.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12