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Electron Beam Excited Plasma CVD for Silicon Growth

Author(s):
Okitsu, K.
Imaizumi, M.
Ito, T.
Yamaguchi, K.
Yamaguchi, M.
Hara, T.
Ban, M.
Tokai, M.
Kawamura, K.
4 more
Publication title:
Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
536
Pub. Year:
1999
Page(from):
539
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994423 [1558994424]
Language:
English
Call no.:
M23500/536
Type:
Conference Proceedings

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