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Enhancement of the Amorphous to Microcrystalline Phase Transition in Silicon Films Deposited by SiF4-H2-He Plasmas

Author(s):
Cicala, G.
Losurdo, M.
Capezzuto, P.
Bruno, G.
Ligonzo, T.
Schiavulli, L.
Minarini, C.
Rossi, M. C.
3 more
Publication title:
Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
536
Pub. Year:
1999
Page(from):
493
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994423 [1558994424]
Language:
English
Call no.:
M23500/536
Type:
Conference Proceedings

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