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Evaluation of 2.0nm Grown and Deposited Dielectrics in 0.1ｦﾌm PMOSFETs

Author(s):
Srivastava, A.
Heinisch, H. H.
Vogel, E.
Parker, C.
Osburn, C. M.
Masnari, N. A.
Wortman, J. J.
Hauser, J. R.
3 more
Publication title:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
525
Pub. Year:
1998
Page(from):
163
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994317 [1558994319]
Language:
English
Call no.:
M23500/525
Type:
Conference Proceedings

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