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Effects of Interface Nonplanarity on the Interface Fracture Energy of the TiN/SiO2 System

Author(s):
Lane, Michael
Ni, Winnie
Dauskardt, Reiner
Ma, Qing
Fujimoto, Harry
Krishna, Nety
1 more
Publication title:
Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
505
Pub. Year:
1998
Page(from):
357
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994102 [1558994106]
Language:
English
Call no.:
M23500/505
Type:
Conference Proceedings

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