Influence of Substrate Off-Cut the Defect Structure in Relaxed Graded Si-Ge/Si Layers

Influence of Substrate Off-Cut the Defect Structure in Relaxed Graded Si-Ge/Si Layers

Author(s):

Publication title:

Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

442

Pub. Year:

1997

Page(from):

343

Pub. info.:

Pittsburgh, Penn: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993464 [1558993460]

Language:

English

Call no.:

M23500/442

Type:

Conference Proceedings

Details

TDL ID:	ZA00019374
Series ID:	PA00000011
Conf. info. (Name):	Symposium on defects in electronic materials
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1996.12.02-1996.12.06

Similar Items:

1 Conference Proceedings High-Quality Germanium Photodiodes on Silicon Substrates Using an Intermediate Chemical Mechanical Polishing Step Samavedam, Srikanth B., Currie, Matthew T., Langdo, Thomas A., Ting, Steve M., Fitzgerald, Eugene A. MRS - Materials Research Society	7 Conference Proceedings Hybrid Valence Bands in Strained-Layer Heterostructures Grown on Relaxed SiGe Virtual Substrates Lee, Minjoo L., Fitzgerald, Eugene A. Materials Research Society
2 Conference Proceedings Suppression of Antiphase Disorder in GaAs Grown on Relaxed GeSi Buffers by Metalorganic Chemical Vapor Deposition Ting, S. M., Samavedam, S. B., Currie, M. T., Langdo, T. A., Fitzgerald, E. A. MRS - Materials Research Society	8 Conference Proceedings Hybrid Valence Bands in Strained-Layer Heterostructures Grown on Relaxed SiGe Virtual Substrates Lee, Minjoo L., Fitzgerald, Eugene A. Materials Research Society
3 Conference Proceedings Defect Structures in Gap/Si Samavedam, Srikanth B., Kvam, Eric P., Ford, Greg, Wessels, Bruce W., Chin, T. P., Woodall, Jerry M. MRS - Materials Research Society	9 Conference Proceedings Smart Cut Technology: the path for advanced SOI substrates Moriceau, H., Lagahe-Blanchard, C., Fournel, F., Pocas, S., Jalaguier, E., Perreau, P., Deguet, C., Ernst, T., Beaumont, … Kluwer Academic Publishers
4 Conference Proceedings Defect Control in Relaxed,Graded GeSi/Si Fitzgerald,E.A., Xie,Y.H., Monroe,D., Watson,G.P., Kuo,J.M., Silverman,P.J. Trans Tech Publications	10 Conference Proceedings Strategies For Direct Monolithic Integration of AlxGa(1-x)As/InxGa(1-x)As LEDS and Lasers on Ge/GeSi/Si Substrates Via Relaxed Graded GexSi(1-x) Buffer Layers Groenert, Michael E., Leitz, Christopher W., Pitera, Arthur J., Yang, Vicky K., Lee, Harry, Ram, Rajeev J., Fitzgerald, … Materials Research Society
5 Conference Proceedings Asymmetric Mosaic Spread During Relaxation in SiGe/Si Strained Layer Superlattices Grown on Miscut Substrates Nam, S., Goorsky, M. S. MRS - Materials Research Society	11 Conference Proceedings Investigation of Triangular Defects in 4H-SiC 4° Off Cut (0001) Si Face Epilayers Grown by CVD A. Shrivastava, P.G. Muzykov, B. Pearman, S.M. Angel, T.S. Sudarshan Trans Tech Publications
6 Conference Proceedings Relaxed SiGe On Insulator Fabricated via Wafer Bonding and Layer Transfer: Etch-back and Smart-cut Alternatives Taraschi, G., Cheng, Z.-Y., Currie, M.T., Leitz, C.W., Langdo, T.A., Lee, M.L., Pitera, A., Fitzgerald, E.A., … Electrochemical Society	12 Conference Proceedings Relaxed InxGa1-xAs Graded Buffers Grown With Organometallic Vapor-Phase Epitaxy on GaAs Bulsara, M. T., Leitz, C., Fitzgerald, E. A. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12