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Electrical study of crystalline silicon coimplanted with erbium and oxygen

Author(s):
Ahn,S.H. ( Massachusetts Institute of Technology )
Palm,J.
Zheng,B.
Duan,X.
Agarwal,A.M.
Nelson,S.F.
Michel,J.
Kimerling,L.C.
3 more
Publication title:
Silicon-Based Monolithic and Hybrid Optoelectronic Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3007
Pub. Year:
1997
Page(from):
144
Page(to):
151
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424181 [0819424188]
Language:
English
Call no.:
P63600/3007
Type:
Conference Proceedings

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