SPC qualification strategy for CD metrology
- Author(s):
- Chain,E.E. ( Motorola )
- Ridens,M.G.
- Annand,J.P.
- Publication title:
- Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2876
- Pub. Year:
- 1996
- Page(from):
- 218
- Page(to):
- 224
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422743 [0819422746]
- Language:
- English
- Call no.:
- P63600/2876
- Type:
- Conference Proceedings
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