Tracing metal defect relating to yield for VLSI manufacturing
- Author(s):
Loe,Y.-C. ( Taiwan Semiconductor Manufacturing Co.,Ltd. ) Lee,C.-H. Lin,C.-C. Yang,C.-M. Lu,K.L. Yang,J.J. - Publication title:
- Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2876
- Pub. Year:
- 1996
- Page(from):
- 45
- Page(to):
- 56
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422743 [0819422746]
- Language:
- English
- Call no.:
- P63600/2876
- Type:
- Conference Proceedings
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