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Effect of CH4/H2 ECR plasma etching on the electrical properties of p-type Hg1-x Cdx Te

Author(s):
Publication title:
Infrared detectors for remote sensing : physics, materials, and devices : 8-9 August 1996, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2816
Pub. Year:
1996
Page(from):
98
Page(to):
105
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422040 [0819422045]
Language:
English
Call no.:
P63600/2816
Type:
Conference Proceedings

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