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Residual stress,composition,and optical properties of SiOxNy thin films deposited by dual ion beam sputtering

Author(s):
Robic,J.Y. ( LETI/CEA/DOPT )
Leplan,H.
Berger,M.
Chaton,P.
Quesnel,E.
Lartigue,O.
Pelle,C.
Pauleau,Y.
Pierre,F.
4 more
Publication title:
Developments in optical component coatings : 15-16 May, 1996, Glasgow, Scotland, UK
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2776
Pub. Year:
1996
Page(from):
381
Page(to):
391
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421616 [0819421618]
Language:
English
Call no.:
P63600/2776
Type:
Conference Proceedings

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