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Electrical characterization of defects introduced during plasma-based processing of GaAs

Author(s):
Auret,F.D.
Goodman,S.A.
Myburg,G.
Meyer,W.E.
Deenapanray,P.N.K.
Murtagh,M.
Ye,S.-R.
Masterson,H.J.
Beechinor,J.T.
Crean,G.M.
5 more
Publication title:
Defects in semiconductors, icds-19 : proceedings of the 19th International Conference on Defects in Semiconductors, Aveiro, Portugal, July 1997
Title of ser.:
Materials science forum
Ser. no.:
258-263
Pub. Year:
1997
Vol.:
Part2
Page(from):
1045
Page(to):
1050
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497881 [0878497889]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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