Design and preliminary studies of environmentally enhanced water-castable, water-developable positive tone resists: model and feasibility studies

Design and preliminary studies of environmentally enhanced water-castable, water-developable positive tone resists: model and feasibility studies

Author(s):

Havard, Jennifer M. ( University of California, Berkeley )

Publication title:

Micro- and nanopatterning polymers

Title of ser.:

ACS symposium series

Ser. no.:

706

Pub. Year:

1998

Page(from):

262

Page(to):

275

Pub. info.:

Washington, DC: American Chemical Society

ISSN:

00976156

ISBN:

9780841235816 [0841235813]

Language:

English

Call no.:

A05800/706

Type:

Conference Proceedings

Details

TDL ID:	ZA00019278
Series ID:	PA00000004
Conf. info. (Name):	ACS National Meeting
Conf. info. (Number):	214th
Conf. info. (Venue):	Las Vegas, NV, USA
Conf. info. (Date):	1997.09.07-1997.09.11

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