Planarization techniques for MEMS: enabling new structures and enhancing manufacturability

Planarization techniques for MEMS: enabling new structures and enhancing manufacturability

Author(s):: Smith,J.H. ( Sandia National Labs. (USA) )
Publication title:: Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 3321
Pub. Year:: 1998
Page(from):: 798
Page(to):: 807
Pub. info.:: Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819427625 [0819427624]
Language:: English
Call no.:: P63600/3321
Type:: Conference Proceedings

Details

TDL ID:	ZA00019242
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Structures, and MEMS
Conf. info. (Number):	1996
Conf. info. (Venue):	Bangalore, India
Conf. info. (Date):	1996.12.11-1996.12.14

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