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Optimization of stress in LPCVD polysilicon films for MEMS applications

Author(s):
  • Singh,J. ( Indian Institute of Technology )
  • Chand,A. ( Indian Institute of Technology )
  • Chandra,S. ( Indian Institute of Technology )
Publication title:
Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3321
Pub. Year:
1998
Page(from):
548
Page(to):
553
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427625 [0819427624]
Language:
English
Call no.:
P63600/3321
Type:
Conference Proceedings

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