ACLV control in x-ray lithography
- Author(s):
- Krasnoperova,A.A. ( Lockheed Martin Federal Systems and IBM Microelectronics Div. )
- Rippstein,R.P. ( Lockheed Martin Federal Systems and IBM Microelectronics Div. )
- Puisto,D.M. ( Lockheed Martin Federal Systems and IBM Microelectronics Div. )
- Rocque,J.M. ( Lockheed Martin Federal Systems and IBM Microelectronics Div. )
- Publication title:
- Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3331
- Pub. Year:
- 1998
- Page(from):
- 165
- Page(to):
- 178
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427762 [0819427764]
- Language:
- English
- Call no.:
- P63600/3331
- Type:
- Conference Proceedings
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