Recent advances in the Sandia EUV 10x microstepper (Invited Paper)

Author(s):

Goldsmith,J.E.M. ( Sandia National Labs. )

Wronosky,J.B. ( Sandia National Labs. )

Barr,P.K. ( Sandia National Labs. )

Berger,K.W. ( Sandia National Labs. )

Bernardez II,L.J. ( Sandia National Labs. )

Cardinale,G.F. ( Sandia National Labs. )

Darnold,J.R. ( Sandia National Labs. )

Folk,D.R. ( Sandia National Labs. )

Haney,S.J. ( Sandia National Labs. )

Henderson,C.C. ( Sandia National Labs. )

Jefferson,K.L. ( Sandia National Labs. )

Krenz,K.D. ( Sandia National Labs. )

Kubiak,G.D. ( Sandia National Labs. )

Nissen,R.P. ( Sandia National Labs. )

O'Connell,D.J. ( Sandia National Labs. )

Perras,Y.E. ( Sandia National Labs. )

Ray-Chaudhuri,A.K. ( Sandia National Labs. )

Smith,T.G. ( Sandia National Labs. )

Stulen,R.H. ( Sandia National Labs. )

Tichenor,D.A. ( Sandia National Labs. )

Ver Berkmoes,A.A. ( Sandia National Labs. )

16 more

Publication title:

Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3331

Pub. Year:

1998

Page(from):

11

Page(to):

19

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427762 [0819427764]

Language:

English

Call no.:

P63600/3331

Type:

Conference Proceedings